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Product
TSA(Trisilylamine)
Formula
N(SiH3)3
Molecular Weight
107.4 g/mol
CAS No
13862-16-3
Physical State
Liquid, colorless
Boiling Point
52 °C
Melting Point
-106 °C
Vapor Pressure
109 TORR at 0°C
Water Reactivity
Water reactive
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