Product Info

제품정보

PRECURSOR

BDEAS

BDEASBis(diethylamino)silane

DRAM & Flash Dielectric
제품상세정보테이블
Chemical Name BDEAS [Bis-Diethylamino Silane]
Formula H2Si((N(C2H5)2)2
Molecular Weight 174.4 g/mol
Boiling Point 188℃
Vapor pressure 4.0torr/ 20℃
Density 0.811 g/mL
Phase at 25℃ Colorless Liquid
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BDEAS 그래프
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Period

1

H

He

2

Li

Be

B

C

N

O

F

Ne

3

Na

Mg

Al

Si

P

S

Cl

Ar

4

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Ca

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Cu

Zn

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Ge

As

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Br

Kr

5

Rb

Sr

Y

Zr

Nb

Mo

Tc

Ru

Rh

Pd

Ag

Cd

In

Sn

Sb

Te

I

Xe

6

Cs

Ba

Lu

Hf

Ta

W

Re

Os

Ir

Pt

Au

Hg

Tl

Pb

Bi

Po

At

Rn

7

Fr

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Li

Rf

Db

Sg

Bh

Hs

Mt

Ds

Rg

Cn

Unt

Uuq

Uup

Uuh

Uus

Uuo

Lanthanoids

La

Ce

Pr

Nd

Pm

Sm

Eu

Gd

Tb

Dy

Ho

Er

Tm

Yb

Actinoids

Ac

Th

Pa

U

Np

Pu

Am

Cm

Bk

Cf

Es

Fm

Md

No