Product Info

제품정보

PRECURSOR

BDEAS

BDEASBis(diethylamino)silane

DRAM & Flash Dielectric
제품상세정보테이블
Chemical Name BDEAS [Bis-Diethylamino Silane]
Formula H2Si((N(C2H5)2)2
Molecular Weight 174.4 g/mol
Boiling Point 188℃
Vapor pressure 4.0torr/ 20℃
Density Colorless Liquid
Phase at 25℃ 0.811 g/mL
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BDEAS 그래프
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Period

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H

He

2

Li

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B

C

N

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3

Na

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Si

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Cl

Ar

4

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5

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I

Xe

6

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Hs

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Unt

Uuq

Uup

Uuh

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Uuo

Lanthanoids

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Yb

Actinoids

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Pa

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Np

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Am

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Cf

Es

Fm

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No