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Precursor
Si
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Product
BDEAS
Bis(diethylamino)silane
Formula
C8H22N2Si
Molecular Weight
174.36 g/mol
CAS No
27804-64-4
Physical State
Colorless liquid
Boiling Point
188 °C
Melting Point
< -10 °C
Vapor Pressure
30torr @ 70°C
Water Reactivity
Moisture sensitive
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