Product Info

PRECURSOR

TEMAZr

TEMAZrTetrakis(ethylmethylamido)zirconium(IV)

DRAM & Flash Dielectric
제품상세정보테이블
Chemical Name TEMAZr [Tetrakis(ethylmethylamido)zirconium(IV)]
Formula C12H32N4Zr
Molecular Weight 323.63 g/mol
Boiling Point 297℃
Vapor pressure 0.005 torr/20℃
Density 1.049 g/mL
Phase at 25℃ Colorless to pale yellow liquid
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Periodic Table
Periodic Table

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

17

18

Period

1

H

He

2

Li

Be

B

C

N

O

F

Ne

3

Na

Mg

Al

Si

P

S

Cl

Ar

4

K

Ca

Sc

Ti

V

Cr

Mn

Fe

Co

Ni

Cu

Zn

Ga

Ge

As

Se

Br

Kr

5

Rb

Sr

Y

Zr

Nb

Mo

Tc

Ru

Rh

Pd

Ag

Cd

In

Sn

Sb

Te

I

Xe

6

Cs

Ba

Lu

Hf

Ta

W

Re

Os

Ir

Pt

Au

Hg

Tl

Pb

Bi

Po

At

Rn

7

Fr

Ra

Li

Rf

Db

Sg

Bh

Hs

Mt

Ds

Rg

Cn

Unt

Uuq

Uup

Uuh

Uus

Uuo

Lanthanoids

La

Ce

Pr

Nd

Pm

Sm

Eu

Gd

Tb

Dy

Ho

Er

Tm

Yb

Actinoids

Ac

Th

Pa

U

Np

Pu

Am

Cm

Bk

Cf

Es

Fm

Md

No